High Accuracy Profile Measurement With a New Virtual Multi-Probe Scanning System
We present a novel virtual multi-probe scanning system and a new error separation method for the exact optical profile reconstruction. The system realized the multi-probe function by a single probe that fixed on a flexible hinge stage. The flexible hinge stage has a millimeter-level travel range and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9181558/ |