Study on the Ozone Gas Sensing Properties of rf-Sputtered Al-Doped NiO Films
Al-doped NiO (NiO:Al) has attracted the interest of researchers due to its excellent optical and electrical properties. In this work, NiO:Al films were deposited on glass substrates by the radio frequencies (rf) sputtering technique at room temperature and they were tested against ozone gas. The Oxy...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/7/3104 |