Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants
Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed, especially for the in situ monitoring on comple...
| Hauptverfasser: | , , , , , , |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
De Gruyter
2025-02-01
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| Schriftenreihe: | Nanophotonics |
| Schlagworte: | |
| Online Zugang: | https://doi.org/10.1515/nanoph-2024-0565 |