Micro-Machining Characteristics of Ceramics by Harmonics of Nd:YAG laser
Aluminum nitride and silicon carbide are expected as a useful material for the substrate in semiconductor industry because of their excellent properties. Precision micro-machining without crack and with little heat affected zone is required for their applications. Shorter wavelength makes it possibl...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2008-07-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/4/2_4_661/_pdf/-char/en |