Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer
This study is aimed to numerically investigate the elastodynamics of a mono-axial MEMS accelerometer. The vibrating part of the device is dipped into a fluid micro-channel and made of a proof mass connected to the frame by two flexible legs. The adopted mathematical model lies on a linearized motion...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MULTIPHYSICS
2016-09-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/228 |