Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer
This study is aimed to numerically investigate the elastodynamics of a mono-axial MEMS accelerometer. The vibrating part of the device is dipped into a fluid micro-channel and made of a proof mass connected to the frame by two flexible legs. The adopted mathematical model lies on a linearized motion...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MULTIPHYSICS
2016-09-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/228 |
| _version_ | 1797705786407780352 |
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| author | A Cammarata G Petrone |
| author_facet | A Cammarata G Petrone |
| author_sort | A Cammarata |
| collection | DOAJ |
| description | This study is aimed to numerically investigate the elastodynamics of a mono-axial MEMS accelerometer. The vibrating part of the device is dipped into a fluid micro-channel and made of a proof mass connected to the frame by two flexible legs. The adopted mathematical model lies on a linearized motion equations system, where the mass matrix is obtained by means of both lumped and distributed approach. The stiffness matrix is otherwise derived through FEA, in which the proof mass and the compliant legs are modeled as rigid and flexible bodies, respectively. The squeezed-film damping effect is evaluated by a fluid-dynamical FE model based on a modified Reynolds formulation. The ensuing analyses are carried-out for three pressure levels of the narrow gas film surrounding the device, by applying the logarithmic decrement method for evaluating the damping ratio. Numerical results, in terms of acceleration, frequency range and noise disturbance, are successfully compared to analytical and experimental ones previously published in literature. Our model characterizes the accelerometer dynamics in space, allowing, in addition, to assess translational motion errors along directions apart the working one. |
| first_indexed | 2024-03-12T05:41:34Z |
| format | Article |
| id | doaj.art-6e78fe2046554ad8b33e408014e01e65 |
| institution | Directory Open Access Journal |
| issn | 1750-9548 2048-3961 |
| language | English |
| last_indexed | 2024-03-12T05:41:34Z |
| publishDate | 2016-09-01 |
| publisher | MULTIPHYSICS |
| record_format | Article |
| series | International Journal of Multiphysics |
| spelling | doaj.art-6e78fe2046554ad8b33e408014e01e652023-09-03T05:58:19ZengMULTIPHYSICSInternational Journal of Multiphysics1750-95482048-39612016-09-017210.1260/1750-9548.7.2.115240Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometerA Cammarata0G Petrone1Department of Industrial Engineering - University of Catania Viale Andrea Doria, 6 - 95126 Catania, ITALYDepartment of Industrial Engineering - University of Catania Viale Andrea Doria, 6 - 95126 Catania, ITALYThis study is aimed to numerically investigate the elastodynamics of a mono-axial MEMS accelerometer. The vibrating part of the device is dipped into a fluid micro-channel and made of a proof mass connected to the frame by two flexible legs. The adopted mathematical model lies on a linearized motion equations system, where the mass matrix is obtained by means of both lumped and distributed approach. The stiffness matrix is otherwise derived through FEA, in which the proof mass and the compliant legs are modeled as rigid and flexible bodies, respectively. The squeezed-film damping effect is evaluated by a fluid-dynamical FE model based on a modified Reynolds formulation. The ensuing analyses are carried-out for three pressure levels of the narrow gas film surrounding the device, by applying the logarithmic decrement method for evaluating the damping ratio. Numerical results, in terms of acceleration, frequency range and noise disturbance, are successfully compared to analytical and experimental ones previously published in literature. Our model characterizes the accelerometer dynamics in space, allowing, in addition, to assess translational motion errors along directions apart the working one.http://journal.multiphysics.org/index.php/IJM/article/view/228 |
| spellingShingle | A Cammarata G Petrone Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer International Journal of Multiphysics |
| title | Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer |
| title_full | Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer |
| title_fullStr | Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer |
| title_full_unstemmed | Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer |
| title_short | Coupled fluid-dynamical and structural analysis of a mono-axial mems accelerometer |
| title_sort | coupled fluid dynamical and structural analysis of a mono axial mems accelerometer |
| url | http://journal.multiphysics.org/index.php/IJM/article/view/228 |
| work_keys_str_mv | AT acammarata coupledfluiddynamicalandstructuralanalysisofamonoaxialmemsaccelerometer AT gpetrone coupledfluiddynamicalandstructuralanalysisofamonoaxialmemsaccelerometer |