Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique

Nanocrystalline Copper Oxide films were deposited on glass substrates by plasma dc sputtering. The effected of discharge current on the structural and optical properties of sputtered films were studied .X-ray diffraction peak of Cu2O (111) and Cu4O3 (112) direction was observed at discharge current...

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Main Authors: Mohammed K. Khalaf, Saba N. Said, Ameen J. Abbas
Format: Article
Language:English
Published: Unviversity of Technology- Iraq 2014-04-01
Series:Engineering and Technology Journal
Online Access:https://etj.uotechnology.edu.iq/article_102605_2da59aa64842727151d0ca97c99d8954.pdf
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author Mohammed K. Khalaf
Saba N. Said
Ameen J. Abbas
author_facet Mohammed K. Khalaf
Saba N. Said
Ameen J. Abbas
author_sort Mohammed K. Khalaf
collection DOAJ
description Nanocrystalline Copper Oxide films were deposited on glass substrates by plasma dc sputtering. The effected of discharge current on the structural and optical properties of sputtered films were studied .X-ray diffraction peak of Cu2O (111) and Cu4O3 (112) direction was observed at discharge current of (15-30) mA when annealed at 500 0C for 2 h. The optical energy gap for the prepared films is estimated to be in (2.05- 2.3) eV range. It was found that the effect of preparation conditions on thin films thickness strongly depends on the discharge current of argon plasma.
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spelling doaj.art-6e7dd794854045ce849ab395546a981b2024-02-04T17:30:33ZengUnviversity of Technology- IraqEngineering and Technology Journal1681-69002412-07582014-04-01324B77077610.30684/etj.32.4B.17102605Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering TechniqueMohammed K. KhalafSaba N. SaidAmeen J. AbbasNanocrystalline Copper Oxide films were deposited on glass substrates by plasma dc sputtering. The effected of discharge current on the structural and optical properties of sputtered films were studied .X-ray diffraction peak of Cu2O (111) and Cu4O3 (112) direction was observed at discharge current of (15-30) mA when annealed at 500 0C for 2 h. The optical energy gap for the prepared films is estimated to be in (2.05- 2.3) eV range. It was found that the effect of preparation conditions on thin films thickness strongly depends on the discharge current of argon plasma.https://etj.uotechnology.edu.iq/article_102605_2da59aa64842727151d0ca97c99d8954.pdf
spellingShingle Mohammed K. Khalaf
Saba N. Said
Ameen J. Abbas
Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
Engineering and Technology Journal
title Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
title_full Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
title_fullStr Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
title_full_unstemmed Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
title_short Characterization of the Copper Oxide Thin Films Deposited by Dc Sputtering Technique
title_sort characterization of the copper oxide thin films deposited by dc sputtering technique
url https://etj.uotechnology.edu.iq/article_102605_2da59aa64842727151d0ca97c99d8954.pdf
work_keys_str_mv AT mohammedkkhalaf characterizationofthecopperoxidethinfilmsdepositedbydcsputteringtechnique
AT sabansaid characterizationofthecopperoxidethinfilmsdepositedbydcsputteringtechnique
AT ameenjabbas characterizationofthecopperoxidethinfilmsdepositedbydcsputteringtechnique