Infrared Reflectance Analysis of Epitaxial n-Type Doped GaN Layers Grown on Sapphire
Abstract Infrared (IR) reflectance spectroscopy is applied to study Si-doped multilayer n+/n0/n+-GaN structure grown on GaN buffer with GaN-template/sapphire substrate. Analysis of the investigated structure by photo-etching, SEM, and SIMS methods showed the existence of the additional layer with th...
Main Authors: | , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2017-06-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1186/s11671-017-2171-0 |