High-Performance AlGaN Double Channel HEMTs with Improved Drain Current Density and High Breakdown Voltage
Abstract In this work, AlGaN double channel heterostructure is proposed and grown by metal organic chemical vapor deposition (MOCVD), and high-performance AlGaN double channel high electron mobility transistors (HEMTs) are fabricated and investigated. The implementation of double channel feature eff...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2020-05-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1186/s11671-020-03345-6 |