Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing

Design Procedure and Fabrication of Reproducible Silicon Vernier Devices for High-Performance Refractive Index Sensing

In this paper, we propose a generalized procedure for the design of integrated Vernier devices for high performance chemical and biochemical sensing. In particular, we demonstrate the accurate control of the most critical design and fabrication parameters of silicon-on-insulator cascade-coupled race...

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Bibliographic Details
Main Authors: Benedetto Troia, Ali Z. Khokhar, Milos Nedeljkovic, Scott A. Reynolds, Youfang Hu, Goran Z. Mashanovich, Vittorio M. N. Passaro
Format: Article
Language:English
Published: MDPI AG 2015-06-01
Series:Sensors
Subjects:
integrated waveguide sensors
optical sensing
Vernier effect
silicon
Online Access:http://www.mdpi.com/1424-8220/15/6/13548

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http://www.mdpi.com/1424-8220/15/6/13548

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