Microscope 3D Point Spread Function Evaluation Method on a Confirmed Object Plane Perpendicular to the Optical Axis

A point spread function evaluation method for a microscope on the object plane that is perpendicular to the optical axis is proposed. The measurement of the incident beam direction from the dual position-sensitive-detector (PSD)-based units, the determination of the object plane perpendicularity and...

Full description

Bibliographic Details
Main Authors: Shuai Mao, Zhenzhou Wang, Jinfeng Pan
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/10/7/2430