Microscope 3D Point Spread Function Evaluation Method on a Confirmed Object Plane Perpendicular to the Optical Axis
A point spread function evaluation method for a microscope on the object plane that is perpendicular to the optical axis is proposed. The measurement of the incident beam direction from the dual position-sensitive-detector (PSD)-based units, the determination of the object plane perpendicularity and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/7/2430 |