Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities
Recent industry trends toward more complex and interconnected systems have increased the demand for more reliable pressure sensors. By integrating a microactuator with a pressure sensor, the sensor can self-calibrate, eliminating the complexities and costs associated with traditional sensor calibrat...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/10/3828 |