A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transduc...

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Bibliographic Details
Main Authors: Tao Liu, Zhihao Li, Jiahuan Zhang, Dongxiao Li, Hanjie Dou, Pengfan Wu, Jiaqian Yang, Wangyang Zhang, Xiaojing Mu
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Micromachines
Subjects:
MEMS
ultrasonic flowmeter
PMUTs array
PZT
Online Access:https://www.mdpi.com/2072-666X/15/1/45

Internet

https://www.mdpi.com/2072-666X/15/1/45

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