A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer
Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transduc...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/1/45 |
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| author | Tao Liu Zhihao Li Jiahuan Zhang Dongxiao Li Hanjie Dou Pengfan Wu Jiaqian Yang Wangyang Zhang Xiaojing Mu |
| author_facet | Tao Liu Zhihao Li Jiahuan Zhang Dongxiao Li Hanjie Dou Pengfan Wu Jiaqian Yang Wangyang Zhang Xiaojing Mu |
| author_sort | Tao Liu |
| collection | DOAJ |
| description | Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup>2</sup>. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%. |
| first_indexed | 2024-03-08T10:40:24Z |
| format | Article |
| id | doaj.art-6f497b85fca74079b80d0e76681f5e6e |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-08T10:40:24Z |
| publishDate | 2023-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-6f497b85fca74079b80d0e76681f5e6e2024-01-26T17:43:20ZengMDPI AGMicromachines2072-666X2023-12-011514510.3390/mi15010045A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic TransducerTao Liu0Zhihao Li1Jiahuan Zhang2Dongxiao Li3Hanjie Dou4Pengfan Wu5Jiaqian Yang6Wangyang Zhang7Xiaojing Mu8Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaKey Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, ChinaUltrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm<sup>2</sup>. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.https://www.mdpi.com/2072-666X/15/1/45MEMSultrasonic flowmeterPMUTs arrayPZT |
| spellingShingle | Tao Liu Zhihao Li Jiahuan Zhang Dongxiao Li Hanjie Dou Pengfan Wu Jiaqian Yang Wangyang Zhang Xiaojing Mu A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer Micromachines MEMS ultrasonic flowmeter PMUTs array PZT |
| title | A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer |
| title_full | A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer |
| title_fullStr | A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer |
| title_full_unstemmed | A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer |
| title_short | A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer |
| title_sort | gas flow measurement system based on lead zirconate titanate piezoelectric micromachined ultrasonic transducer |
| topic | MEMS ultrasonic flowmeter PMUTs array PZT |
| url | https://www.mdpi.com/2072-666X/15/1/45 |
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