Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Abstract Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2023-10-01
|
Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-022-00481-0 |