Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Abstract Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2023-10-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00481-0 |
| _version_ | 1797647264893632512 |
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| author | Jaka Pribošek Markus Bainschab Takashi Sasaki |
| author_facet | Jaka Pribošek Markus Bainschab Takashi Sasaki |
| author_sort | Jaka Pribošek |
| collection | DOAJ |
| description | Abstract Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes. |
| first_indexed | 2024-03-11T15:14:48Z |
| format | Article |
| id | doaj.art-6f69208de67e43309d01cc53cb91b857 |
| institution | Directory Open Access Journal |
| issn | 2055-7434 |
| language | English |
| last_indexed | 2024-03-11T15:14:48Z |
| publishDate | 2023-10-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj.art-6f69208de67e43309d01cc53cb91b8572023-10-29T12:27:05ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342023-10-019111510.1038/s41378-022-00481-0Varifocal MEMS mirrors for high-speed axial focus scanning: a reviewJaka Pribošek0Markus Bainschab1Takashi Sasaki2Silicon Austria LabsSilicon Austria LabsSilicon Austria LabsAbstract Recent advances brought the performance of MEMS-based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation above several hundred kHz, and can be designed to combine focusing with lateral steering in a single-chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on the basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as a systematic study of methods reported to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future technological development of next-generation varifocal mirrors reaching the axial resolution of 1000 resolvable planes.https://doi.org/10.1038/s41378-022-00481-0 |
| spellingShingle | Jaka Pribošek Markus Bainschab Takashi Sasaki Varifocal MEMS mirrors for high-speed axial focus scanning: a review Microsystems & Nanoengineering |
| title | Varifocal MEMS mirrors for high-speed axial focus scanning: a review |
| title_full | Varifocal MEMS mirrors for high-speed axial focus scanning: a review |
| title_fullStr | Varifocal MEMS mirrors for high-speed axial focus scanning: a review |
| title_full_unstemmed | Varifocal MEMS mirrors for high-speed axial focus scanning: a review |
| title_short | Varifocal MEMS mirrors for high-speed axial focus scanning: a review |
| title_sort | varifocal mems mirrors for high speed axial focus scanning a review |
| url | https://doi.org/10.1038/s41378-022-00481-0 |
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