Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator

We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mum times 10 mum, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2middot10<sup>-5</sup> RIU for changes in the r...

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Bibliographic Details
Main Authors: Tom Claes, Jordi Girones Molera, Katrien De Vos, Etienne Schacht, Roel Baets, Peter Bienstman
Format: Article
Language:English
Published: IEEE 2009-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/5232865/