Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator
We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mum times 10 mum, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4.2middot10<sup>-5</sup> RIU for changes in the r...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2009-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/5232865/ |