High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers
This paper presents single- and dual-loop fuzzy control schemes to precisely control the piezo-driven nanopositioner in the x- and y-axis directions. Various issues are associated with this control problem, such as low stability margin due to the sharp resonant peak, nonlinear dynamics, parameter un...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-01-01
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Series: | Computers |
Subjects: | |
Online Access: | http://www.mdpi.com/2073-431X/7/1/10 |