Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides
Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguide and tested for its nonlinear behavior using a 90-...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_01001.pdf |