Air Core ARROW Waveguides Fabricated in a Membrane-Covered Trench
We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Fo...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-05-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/11/6/502 |