Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography

Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography

Zirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components...

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Bibliographic Details
Main Authors: Nicolas Crespo-Monteiro, Arnaud Valour, Victor Vallejo-Otero, Marie Traynar, Stéphanie Reynaud, Emilie Gamet, Yves Jourlin
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Materials
Subjects:
zirconium oxide
sol-gel
optical lithography
nano-imprint lithography
non-planar substrates
plastic
Online Access:https://www.mdpi.com/1996-1944/15/16/5596

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https://www.mdpi.com/1996-1944/15/16/5596

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