Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
Zirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components...
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2022-08-01
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author | Nicolas Crespo-Monteiro Arnaud Valour Victor Vallejo-Otero Marie Traynar Stéphanie Reynaud Emilie Gamet Yves Jourlin |
author_facet | Nicolas Crespo-Monteiro Arnaud Valour Victor Vallejo-Otero Marie Traynar Stéphanie Reynaud Emilie Gamet Yves Jourlin |
author_sort | Nicolas Crespo-Monteiro |
collection | DOAJ |
description | Zirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO<sub>2</sub> can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO<sub>2</sub> layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO<sub>2</sub> sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO<sub>2</sub> sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates. |
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institution | Directory Open Access Journal |
issn | 1996-1944 |
language | English |
last_indexed | 2024-03-09T13:02:49Z |
publishDate | 2022-08-01 |
publisher | MDPI AG |
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series | Materials |
spelling | doaj.art-70beb5a988d7406380fbdae7400a76202023-11-30T21:52:49ZengMDPI AGMaterials1996-19442022-08-011516559610.3390/ma15165596Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint LithographyNicolas Crespo-Monteiro0Arnaud Valour1Victor Vallejo-Otero2Marie Traynar3Stéphanie Reynaud4Emilie Gamet5Yves Jourlin6Université de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceZirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO<sub>2</sub> can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO<sub>2</sub> layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO<sub>2</sub> sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO<sub>2</sub> sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates.https://www.mdpi.com/1996-1944/15/16/5596zirconium oxidesol-geloptical lithographynano-imprint lithographynon-planar substratesplastic |
spellingShingle | Nicolas Crespo-Monteiro Arnaud Valour Victor Vallejo-Otero Marie Traynar Stéphanie Reynaud Emilie Gamet Yves Jourlin Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography Materials zirconium oxide sol-gel optical lithography nano-imprint lithography non-planar substrates plastic |
title | Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography |
title_full | Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography |
title_fullStr | Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography |
title_full_unstemmed | Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography |
title_short | Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography |
title_sort | versatile zirconium oxide zro sub 2 sub sol gel development for the micro structuring of various substrates nature and shape by optical and nano imprint lithography |
topic | zirconium oxide sol-gel optical lithography nano-imprint lithography non-planar substrates plastic |
url | https://www.mdpi.com/1996-1944/15/16/5596 |
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