Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography

Zirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components...

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Main Authors: Nicolas Crespo-Monteiro, Arnaud Valour, Victor Vallejo-Otero, Marie Traynar, Stéphanie Reynaud, Emilie Gamet, Yves Jourlin
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/16/5596
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author Nicolas Crespo-Monteiro
Arnaud Valour
Victor Vallejo-Otero
Marie Traynar
Stéphanie Reynaud
Emilie Gamet
Yves Jourlin
author_facet Nicolas Crespo-Monteiro
Arnaud Valour
Victor Vallejo-Otero
Marie Traynar
Stéphanie Reynaud
Emilie Gamet
Yves Jourlin
author_sort Nicolas Crespo-Monteiro
collection DOAJ
description Zirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO<sub>2</sub> can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO<sub>2</sub> layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO<sub>2</sub> sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO<sub>2</sub> sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates.
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spelling doaj.art-70beb5a988d7406380fbdae7400a76202023-11-30T21:52:49ZengMDPI AGMaterials1996-19442022-08-011516559610.3390/ma15165596Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint LithographyNicolas Crespo-Monteiro0Arnaud Valour1Victor Vallejo-Otero2Marie Traynar3Stéphanie Reynaud4Emilie Gamet5Yves Jourlin6Université de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceUniversité de Lyon, Université Jean-Monnet-Saint Etienne, Laboratoire Hubert Curien, UMR CNRS 5516, 42000 Saint-Etienne, FranceZirconium oxide (ZrO<sub>2</sub>) is a well-studied and promising material due to its remarkable chemical and physical properties. It is used, for example, in coatings for corrosion protection layer, wear and oxidation, in optical applications (mirror, filters), for decorative components, for anti-counterfeiting solutions and for medical applications. ZrO<sub>2</sub> can be obtained as a thin film using different deposition methods such as physical vapor deposition (PVD) or chemical vapor deposition (CVD). These techniques are mastered but they do not allow easy micro-nanostructuring of these coatings due to the intrinsic properties (high melting point, mechanical and chemical resistance). An alternative approach described in this paper is the sol-gel method, which allows direct micro-nanostructuring of the ZrO<sub>2</sub> layers without physical or chemical etching processes, using optical or nano-imprint lithography. In this paper, the authors present a complete and suitable ZrO<sub>2</sub> sol-gel method allowing to achieve complex micro-nanostructures by optical or nano-imprint lithography on substrates of different nature and shape (especially non-planar and foil-based substrates). The synthesis of the ZrO<sub>2</sub> sol-gel is presented as well as the micro-nanostructuring process by masking, colloidal lithography and nano-imprint lithography on glass and plastic substrates as well as on plane and curved substrates.https://www.mdpi.com/1996-1944/15/16/5596zirconium oxidesol-geloptical lithographynano-imprint lithographynon-planar substratesplastic
spellingShingle Nicolas Crespo-Monteiro
Arnaud Valour
Victor Vallejo-Otero
Marie Traynar
Stéphanie Reynaud
Emilie Gamet
Yves Jourlin
Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
Materials
zirconium oxide
sol-gel
optical lithography
nano-imprint lithography
non-planar substrates
plastic
title Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
title_full Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
title_fullStr Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
title_full_unstemmed Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
title_short Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography
title_sort versatile zirconium oxide zro sub 2 sub sol gel development for the micro structuring of various substrates nature and shape by optical and nano imprint lithography
topic zirconium oxide
sol-gel
optical lithography
nano-imprint lithography
non-planar substrates
plastic
url https://www.mdpi.com/1996-1944/15/16/5596
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