Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications

Hafnium oxide (HfO2) films on silicon have the potential for application in photovoltaic devices. However, very little is known about the photoelectrochemical and protective properties of HfO2 films on Si. In this study, ultrathin films of HfO2 in the range of 15–70 nm were deposited on p-Si and Au...

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Main Authors: Laurynas Staišiūnas, Putinas Kalinauskas, Eimutis Juzeliūnas, Asta Grigucevičienė, Konstantinas Leinartas, Gediminas Niaura, Sandra Stanionytė, Algirdas Selskis
Format: Article
Language:English
Published: Frontiers Media S.A. 2022-03-01
Series:Frontiers in Chemistry
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Online Access:https://www.frontiersin.org/articles/10.3389/fchem.2022.859023/full
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author Laurynas Staišiūnas
Putinas Kalinauskas
Eimutis Juzeliūnas
Asta Grigucevičienė
Konstantinas Leinartas
Gediminas Niaura
Sandra Stanionytė
Algirdas Selskis
author_facet Laurynas Staišiūnas
Putinas Kalinauskas
Eimutis Juzeliūnas
Asta Grigucevičienė
Konstantinas Leinartas
Gediminas Niaura
Sandra Stanionytė
Algirdas Selskis
author_sort Laurynas Staišiūnas
collection DOAJ
description Hafnium oxide (HfO2) films on silicon have the potential for application in photovoltaic devices. However, very little is known about the photoelectrochemical and protective properties of HfO2 films on Si. In this study, ultrathin films of HfO2 in the range of 15–70 nm were deposited on p-Si and Au substrates by atomic layer deposition (ALD). Grazing incidence X-ray diffraction (GI-XRD) identified the amorphous structure of the layers. Quartz crystal nanogravimetry (QCN) with Si and Au substrates indicated dynamics of electrolyte intake into the oxide film. No indications of oxide dissolution have been observed in acid (pH 3) and alkaline (pH 12) electrolytes. Mott–Schottky plots showed that the dark Si surface adjacent to the SiHfO2 interface is positively charged in an acid electrolyte and negatively charged in an alkaline electrolyte. The number of photoelectrons was determined to be much greater than the doping level of silicon. The cathodic photoactivity of the p-Si electrode protected by HfO2 films was studied with respect to the reaction of hydrogen reduction in acid and alkaline solutions. In acid solution, the film enhanced the reduction process when compared to that on the coating free electrode. The acceleration effect was explained in terms of prevention of silicon oxide formation, whose passivating capability is higher than that of hafnia films. In an alkaline electrolyte, an inhibition effect of the film was determined. Hafnia films protected Si from corrosion in this medium; however, at the same time, the film reduced electrode activity.
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spelling doaj.art-71178ec8d2e44a269bcee0e9e67471df2022-12-21T23:54:09ZengFrontiers Media S.A.Frontiers in Chemistry2296-26462022-03-011010.3389/fchem.2022.859023859023Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical ApplicationsLaurynas StaišiūnasPutinas KalinauskasEimutis JuzeliūnasAsta GrigucevičienėKonstantinas LeinartasGediminas NiauraSandra StanionytėAlgirdas SelskisHafnium oxide (HfO2) films on silicon have the potential for application in photovoltaic devices. However, very little is known about the photoelectrochemical and protective properties of HfO2 films on Si. In this study, ultrathin films of HfO2 in the range of 15–70 nm were deposited on p-Si and Au substrates by atomic layer deposition (ALD). Grazing incidence X-ray diffraction (GI-XRD) identified the amorphous structure of the layers. Quartz crystal nanogravimetry (QCN) with Si and Au substrates indicated dynamics of electrolyte intake into the oxide film. No indications of oxide dissolution have been observed in acid (pH 3) and alkaline (pH 12) electrolytes. Mott–Schottky plots showed that the dark Si surface adjacent to the SiHfO2 interface is positively charged in an acid electrolyte and negatively charged in an alkaline electrolyte. The number of photoelectrons was determined to be much greater than the doping level of silicon. The cathodic photoactivity of the p-Si electrode protected by HfO2 films was studied with respect to the reaction of hydrogen reduction in acid and alkaline solutions. In acid solution, the film enhanced the reduction process when compared to that on the coating free electrode. The acceleration effect was explained in terms of prevention of silicon oxide formation, whose passivating capability is higher than that of hafnia films. In an alkaline electrolyte, an inhibition effect of the film was determined. Hafnia films protected Si from corrosion in this medium; however, at the same time, the film reduced electrode activity.https://www.frontiersin.org/articles/10.3389/fchem.2022.859023/fullsiliconpassivationphotoelectrochemistryhafnium oxidenanogravimetryhydrogen photogeneration
spellingShingle Laurynas Staišiūnas
Putinas Kalinauskas
Eimutis Juzeliūnas
Asta Grigucevičienė
Konstantinas Leinartas
Gediminas Niaura
Sandra Stanionytė
Algirdas Selskis
Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
Frontiers in Chemistry
silicon
passivation
photoelectrochemistry
hafnium oxide
nanogravimetry
hydrogen photogeneration
title Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
title_full Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
title_fullStr Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
title_full_unstemmed Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
title_short Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications
title_sort silicon passivation by ultrathin hafnium oxide layer for photoelectrochemical applications
topic silicon
passivation
photoelectrochemistry
hafnium oxide
nanogravimetry
hydrogen photogeneration
url https://www.frontiersin.org/articles/10.3389/fchem.2022.859023/full
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