A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

High-performance MEMS accelerometers usually use a pendulum structure with a larger mass. Although the performance of the device is guaranteed, the manufacturing cost is high. This paper proposes a method of fabricating high-performance MEMS accelerometers with a TGV process, which can reduce the ma...

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Bibliographic Details
Main Authors: Yingchun Fu, Guowei Han, Jiebin Gu, Yongmei Zhao, Jin Ning, Zhenyu Wei, Fuhua Yang, Chaowei Si
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
MEMS accelerometer
TGV
distributed stoppers
comb structure
Online Access:https://www.mdpi.com/2072-666X/13/7/1071

Internet

https://www.mdpi.com/2072-666X/13/7/1071

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