Self-patterned ultra-sharp diamond tips and their application for advanced nanoelectronics device characterization by electrical SPM
The continuous downscaling of nanoelectronics devices requires metrology solutions with sub-nanometer spatial resolution. Electrical scanning probe microscopy (E-SPM) techniques such as scanning spreading resistance microscopy have become important tools to map the electronic properties of these dev...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-06-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007223000254 |