Stoichiometric Cr2AlC MAX phase coatings deposited by HPPMS from composite targets using industrial deposition technology

Stoichiometric Cr2AlC MAX phase coatings deposited by HPPMS from composite targets using industrial deposition technology

Compositionally-graded Cr2AlC coatings were deposited from composite targets with Al concentration gradients along the long-axis of the targets, ranging from 20.0 to 30.0 at.%, in an industrial plant. Stoichiometric Cr2AlC coatings deposited by HPPMS with a peak-power density of 217 W/cm2 and at sub...

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Bibliographic Details
Main Authors: Yu-Ping Chien, Stanislav Mráz, Clio Azina, Szilárd Kolozsvári, Peter Polcik, Jochen M. Schneider
Format: Article
Language:English
Published: Elsevier 2024-03-01
Series:Open Ceramics
Subjects:
Magnetron sputtering
Substrate rotation
HIPIMS
Cr2AlC MAX phase
Thin films
Online Access:http://www.sciencedirect.com/science/article/pii/S2666539524000026

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