Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators
In this paper, a multi-material radial phononic crystal (M-RPC) structure is proposed to reduce the anchor-point loss of piezoelectric micro-electro-mechanical system (MEMS) resonators and improve their quality factor. Compared with single-material phononic crystal structures, an M-RPC structure can...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-12-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/1/20 |