A Compact and High-Precision Three-Degree-of-Freedom Grating Encoder Based on a Quadrangular Frustum Pyramid Prism
A compact and high-precision three-degrees-of-freedom (DOF; X, Y, and Z directions) grating encoder based on the quadrangular frustum pyramid (QFP) prisms is proposed in this paper to solve the insufficient installation space problem of the reading head of the multi-DOF in high-precision displacemen...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/8/4022 |