Fabrication of Graphene Nanomesh FET Terahertz Detector

Fabrication of Graphene Nanomesh FET Terahertz Detector

High sensitivity detection of terahertz waves can be achieved with a graphene nanomesh as grating to improve the coupling efficiency of the incident terahertz waves and using a graphene nanostructure energy gap to enhance the excitation of plasmon. Herein, the fabrication process of the FET THz dete...

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Bibliographic Details
Main Authors: Yuan Zhai, Yi Xiang, Weiqing Yuan, Gang Chen, Jinliang Shi, Gaofeng Liang, Zhongquan Wen, Ying Wu
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Micromachines
Subjects:
graphene nanomesh
Si<sub>3</sub>N<sub>4</sub> dielectric layer
FET
terahertz detector
Online Access:https://www.mdpi.com/2072-666X/12/6/641

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https://www.mdpi.com/2072-666X/12/6/641

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