Optimization of the electrostatic structure of the ion microprobe

Optimization of the electrostatic structure of the ion microprobe

The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 · mrad2 · MeV. To achieve higher microprobe resolution it is intended to place an electrosta...

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Bibliographic Details
Main Authors: I. G. Ignat'ev, V. I. Miroshnychenko, O. G. Ponomarev, V. Yu. Storizhko
Format: Article
Language:English
Published: Institute for Nuclear Research, National Academy of Sciences of Ukraine 2012-03-01
Series:Âderna Fìzika ta Energetika
Subjects:
ion beam; immersion probe-forming system; optimizations; electrostatic accelerator
Online Access:http://jnpae.kinr.kiev.ua/13.1/Articles_PDF/jnpae-2012-13-0097-Ignatev.pdf

Internet

http://jnpae.kinr.kiev.ua/13.1/Articles_PDF/jnpae-2012-13-0097-Ignatev.pdf

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