Internal Stress in the Porous Anodic Alumina/Aluminum System
The internal stresses of the aluminum films deposited at various substrate temperatures and evaporation rates are studied. It is shown that tensile stresses are present in the aluminum film. The tensile stresses values are equal to (1.0- 3.5)´107 N/m2 to be comparable with the aluminum yield point (...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2021-01-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/january_2021/Vol_248/P_3200.pdf |