Internal Stress in the Porous Anodic Alumina/Aluminum System
The internal stresses of the aluminum films deposited at various substrate temperatures and evaporation rates are studied. It is shown that tensile stresses are present in the aluminum film. The tensile stresses values are equal to (1.0- 3.5)´107 N/m2 to be comparable with the aluminum yield point (...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2021-01-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/january_2021/Vol_248/P_3200.pdf |
| _version_ | 1797753822747033600 |
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| author | Valentina YAKOVTSEVA Vladimir SHULGOV Dzmitry SHIMANOVICH |
| author_facet | Valentina YAKOVTSEVA Vladimir SHULGOV Dzmitry SHIMANOVICH |
| author_sort | Valentina YAKOVTSEVA |
| collection | DOAJ |
| description | The internal stresses of the aluminum films deposited at various substrate temperatures and evaporation rates are studied. It is shown that tensile stresses are present in the aluminum film. The tensile stresses values are equal to (1.0- 3.5)´107 N/m2 to be comparable with the aluminum yield point (2.3´107 N/m2). Theoretical and experimental studies of deformation and stress at the porous aluminum oxide-aluminum interface are discussed. It is shown that the internal stresses in the growing porous oxide are always compressive stresses and practically do not depend on the internal stresses in the initial aluminum film. The last testifies the fact of reaching the aluminum yield point at the oxide formation. |
| first_indexed | 2024-03-12T17:24:28Z |
| format | Article |
| id | doaj.art-729cac5b1ee7489988d2fbb83fca6040 |
| institution | Directory Open Access Journal |
| issn | 2306-8515 1726-5479 |
| language | English |
| last_indexed | 2024-03-12T17:24:28Z |
| publishDate | 2021-01-01 |
| publisher | IFSA Publishing, S.L. |
| record_format | Article |
| series | Sensors & Transducers |
| spelling | doaj.art-729cac5b1ee7489988d2fbb83fca60402023-08-05T09:13:00ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792021-01-0124813035Internal Stress in the Porous Anodic Alumina/Aluminum SystemValentina YAKOVTSEVA0Vladimir SHULGOV1Dzmitry SHIMANOVICH2Belarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsBelarusian State University of Informatics and RadioelectronicsThe internal stresses of the aluminum films deposited at various substrate temperatures and evaporation rates are studied. It is shown that tensile stresses are present in the aluminum film. The tensile stresses values are equal to (1.0- 3.5)´107 N/m2 to be comparable with the aluminum yield point (2.3´107 N/m2). Theoretical and experimental studies of deformation and stress at the porous aluminum oxide-aluminum interface are discussed. It is shown that the internal stresses in the growing porous oxide are always compressive stresses and practically do not depend on the internal stresses in the initial aluminum film. The last testifies the fact of reaching the aluminum yield point at the oxide formation.https://sensorsportal.com/HTML/DIGEST/january_2021/Vol_248/P_3200.pdfaluminumanodic aluminatwo-layer systeminternal stressdeformation |
| spellingShingle | Valentina YAKOVTSEVA Vladimir SHULGOV Dzmitry SHIMANOVICH Internal Stress in the Porous Anodic Alumina/Aluminum System Sensors & Transducers aluminum anodic alumina two-layer system internal stress deformation |
| title | Internal Stress in the Porous Anodic Alumina/Aluminum System |
| title_full | Internal Stress in the Porous Anodic Alumina/Aluminum System |
| title_fullStr | Internal Stress in the Porous Anodic Alumina/Aluminum System |
| title_full_unstemmed | Internal Stress in the Porous Anodic Alumina/Aluminum System |
| title_short | Internal Stress in the Porous Anodic Alumina/Aluminum System |
| title_sort | internal stress in the porous anodic alumina aluminum system |
| topic | aluminum anodic alumina two-layer system internal stress deformation |
| url | https://sensorsportal.com/HTML/DIGEST/january_2021/Vol_248/P_3200.pdf |
| work_keys_str_mv | AT valentinayakovtseva internalstressintheporousanodicaluminaaluminumsystem AT vladimirshulgov internalstressintheporousanodicaluminaaluminumsystem AT dzmitryshimanovich internalstressintheporousanodicaluminaaluminumsystem |