Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi di...
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MDPI AG
2020-06-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/13/12/2816 |
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| author | Aimo Winkelmann Gert Nolze Grzegorz Cios Tomasz Tokarski Piotr Bała |
| author_facet | Aimo Winkelmann Gert Nolze Grzegorz Cios Tomasz Tokarski Piotr Bała |
| author_sort | Aimo Winkelmann |
| collection | DOAJ |
| description | For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center. |
| first_indexed | 2024-03-10T18:57:20Z |
| format | Article |
| id | doaj.art-72aceb15dc1b4637a522f61a2ac05b11 |
| institution | Directory Open Access Journal |
| issn | 1996-1944 |
| language | English |
| last_indexed | 2024-03-10T18:57:20Z |
| publishDate | 2020-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Materials |
| spelling | doaj.art-72aceb15dc1b4637a522f61a2ac05b112023-11-20T04:40:54ZengMDPI AGMaterials1996-19442020-06-011312281610.3390/ma13122816Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction MapsAimo Winkelmann0Gert Nolze1Grzegorz Cios2Tomasz Tokarski3Piotr Bała4Academic Centre for Materials and Nanotechnology, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, PolandFederal Institute for Materials, Research and Testing (BAM), Unter den Eichen 87, 12205 Berlin, GermanyAcademic Centre for Materials and Nanotechnology, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, PolandAcademic Centre for Materials and Nanotechnology, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, PolandAcademic Centre for Materials and Nanotechnology, AGH University of Science and Technology, al. A. Mickiewicza 30, 30-059 Krakow, PolandFor the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center.https://www.mdpi.com/1996-1944/13/12/2816scanning electron microscopyelectron backscatter diffractionKikuchi diffractionprojection centerorientation precision |
| spellingShingle | Aimo Winkelmann Gert Nolze Grzegorz Cios Tomasz Tokarski Piotr Bała Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps Materials scanning electron microscopy electron backscatter diffraction Kikuchi diffraction projection center orientation precision |
| title | Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps |
| title_full | Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps |
| title_fullStr | Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps |
| title_full_unstemmed | Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps |
| title_short | Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps |
| title_sort | refined calibration model for improving the orientation precision of electron backscatter diffraction maps |
| topic | scanning electron microscopy electron backscatter diffraction Kikuchi diffraction projection center orientation precision |
| url | https://www.mdpi.com/1996-1944/13/12/2816 |
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