Using Temporally Synthesized Laser Pulses to Enhance the Conversion Efficiency of Sn Plasmas for EUV Lithography

Using Temporally Synthesized Laser Pulses to Enhance the Conversion Efficiency of Sn Plasmas for EUV Lithography

We have studied the laser pulse shape dependence of the conversion efficiency of λ = 1.03 μm laser pulse energy into 13.5 nm extreme ultraviolet (EUV) emission from a Sn laser-produced plasma. Laser pulses of arbitrary temporal shape ranging from hundreds of picoseconds to seve...

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Bibliographic Details
Main Authors: Liang Yin, Hanchen Wang, Brendan A. Reagan, Cory Baumgarten, Zhonghao Lyu, Regina Soufli, Eric Gullikson, Vyacheslav N. Shlyaptsev, Jorge J. Rocca
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
Subjects:
EUV emission
conversion efficiency
laser-produced plasma
pulse shaping
pulse sequence
Spectroscopic characterization
Online Access:https://ieeexplore.ieee.org/document/9311829/

Internet

https://ieeexplore.ieee.org/document/9311829/

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