Study on silicon crystallization with aluminum deposition temperature in the aluminum-induced crystallization process using silicon oxide
Aluminum-induced crystallization (AIC) is one process which increases silicon grain size at low temperatures. In this study, we analyzed the effect of silicon crystallization according to the aluminum deposition conditions in the AIC process using silicon oxide. The initial aluminum layer was analyz...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5026990 |