Crystal-orientation-dependent physical sputtering from four elemental metals
Physical sputtering and its dependence on crystal orientation is well-known, but crystallinity of the target is neither commonly considered in simulations nor when publishing experimental values for its yield. Due to the recent development of detector technology and therefore of crystal orientation...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-12-01
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| Series: | Nuclear Materials and Energy |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2352179123001989 |