3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes

3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in t...

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Bibliographic Details
Main Authors: Lukas Matthias Seewald, Jürgen Sattelkow, Michele Brugger-Hatzl, Gerald Kothleitner, Hajo Frerichs, Christian Schwalb, Stefan Hummel, Harald Plank
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/24/4477