3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes
3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in t...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-12-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/24/4477 |
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| author | Lukas Matthias Seewald Jürgen Sattelkow Michele Brugger-Hatzl Gerald Kothleitner Hajo Frerichs Christian Schwalb Stefan Hummel Harald Plank |
| author_facet | Lukas Matthias Seewald Jürgen Sattelkow Michele Brugger-Hatzl Gerald Kothleitner Hajo Frerichs Christian Schwalb Stefan Hummel Harald Plank |
| author_sort | Lukas Matthias Seewald |
| collection | DOAJ |
| description | 3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy—high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design. |
| first_indexed | 2024-03-09T16:01:20Z |
| format | Article |
| id | doaj.art-7327ff88ff5a4cafadab3902a314e270 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T16:01:20Z |
| publishDate | 2022-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-7327ff88ff5a4cafadab3902a314e2702023-11-24T17:05:03ZengMDPI AGNanomaterials2079-49912022-12-011224447710.3390/nano122444773D Nanoprinting of All-Metal Nanoprobes for Electric AFM ModesLukas Matthias Seewald0Jürgen Sattelkow1Michele Brugger-Hatzl2Gerald Kothleitner3Hajo Frerichs4Christian Schwalb5Stefan Hummel6Harald Plank7Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, AustriaChristian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, AustriaChristian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, AustriaInstitute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, AustriaGETec Microscopy Inc., 1020 Wien, AustriaGETec Microscopy Inc., 1020 Wien, AustriaGETec Microscopy Inc., 1020 Wien, AustriaChristian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Graz University of Technology, 8010 Graz, Austria3D nanoprinting via focused electron beam induced deposition (FEBID) is applied for fabrication of all-metal nanoprobes for atomic force microscopy (AFM)-based electrical operation modes. The 3D tip concept is based on a hollow-cone (HC) design, with all-metal material properties and apex radii in the sub-10 nm regime to allow for high-resolution imaging during morphological imaging, conductive AFM (CAFM) and electrostatic force microscopy (EFM). The study starts with design aspects to motivate the proposed HC architecture, followed by detailed fabrication characterization to identify and optimize FEBID process parameters. To arrive at desired material properties, e-beam assisted purification in low-pressure water atmospheres was applied at room temperature, which enabled the removal of carbon impurities from as-deposited structures. The microstructure of final HCs was analyzed via scanning transmission electron microscopy—high-angle annular dark field (STEM-HAADF), whereas electrical and mechanical properties were investigated in situ using micromanipulators. Finally, AFM/EFM/CAFM measurements were performed in comparison to non-functional, high-resolution tips and commercially available electric probes. In essence, we demonstrate that the proposed all-metal HCs provide the resolution capabilities of the former, with the electric conductivity of the latter onboard, combining both assets in one design.https://www.mdpi.com/2079-4991/12/24/44773D nanoprintingadditive manufacturingdirect-write nanofabricationfocused electron beam induced depositionmetal nanostructuresplatinum |
| spellingShingle | Lukas Matthias Seewald Jürgen Sattelkow Michele Brugger-Hatzl Gerald Kothleitner Hajo Frerichs Christian Schwalb Stefan Hummel Harald Plank 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes Nanomaterials 3D nanoprinting additive manufacturing direct-write nanofabrication focused electron beam induced deposition metal nanostructures platinum |
| title | 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes |
| title_full | 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes |
| title_fullStr | 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes |
| title_full_unstemmed | 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes |
| title_short | 3D Nanoprinting of All-Metal Nanoprobes for Electric AFM Modes |
| title_sort | 3d nanoprinting of all metal nanoprobes for electric afm modes |
| topic | 3D nanoprinting additive manufacturing direct-write nanofabrication focused electron beam induced deposition metal nanostructures platinum |
| url | https://www.mdpi.com/2079-4991/12/24/4477 |
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