CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY
Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and reco...
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Format: | Article |
Language: | Russian |
Published: |
Tver State University
2015-11-01
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Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
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Online Access: | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdf |