CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY
Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and reco...
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| Format: | Article |
| Language: | Russian |
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Tver State University
2015-11-01
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| Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
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| Online Access: | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdf |
| _version_ | 1811342657464565760 |
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| author | D.L. Shimanovich |
| author_facet | D.L. Shimanovich |
| author_sort | D.L. Shimanovich |
| collection | DOAJ |
| description | Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of electrolyte anions embedded in pore walls on adsorption and desorption processes in humidity sensing elements. |
| first_indexed | 2024-04-13T19:14:40Z |
| format | Article |
| id | doaj.art-732f48151e564288ae734b766554f20b |
| institution | Directory Open Access Journal |
| issn | 2226-4442 2658-4360 |
| language | Russian |
| last_indexed | 2024-04-13T19:14:40Z |
| publishDate | 2015-11-01 |
| publisher | Tver State University |
| record_format | Article |
| series | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| spelling | doaj.art-732f48151e564288ae734b766554f20b2022-12-22T02:33:43ZrusTver State UniversityФизико-химические аспекты изучения кластеров, наноструктур и наноматериалов2226-44422658-43602015-11-017533540CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDYD.L. Shimanovich0Belarusian State University of Informatics and Radioelectronics Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of electrolyte anions embedded in pore walls on adsorption and desorption processes in humidity sensing elements.http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdfaluminumelectrochemical anodizationporous aluminabarrier layermembranenanostructured materialhumidity sensing elementadsorptionresponse timerecovery timesensitivity |
| spellingShingle | D.L. Shimanovich CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов aluminum electrochemical anodization porous alumina barrier layer membrane nanostructured material humidity sensing element adsorption response time recovery time sensitivity |
| title | CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY |
| title_full | CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY |
| title_fullStr | CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY |
| title_full_unstemmed | CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY |
| title_short | CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY |
| title_sort | constructively technological principles of capacitive humidity sensing al2o3 nanostructures and sensitive parameters study |
| topic | aluminum electrochemical anodization porous alumina barrier layer membrane nanostructured material humidity sensing element adsorption response time recovery time sensitivity |
| url | http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdf |
| work_keys_str_mv | AT dlshimanovich constructivelytechnologicalprinciplesofcapacitivehumiditysensingal2o3nanostructuresandsensitiveparametersstudy |