Analysis of a Lateral Grain Boundary for Reducing Performance Variations in Poly-Si 1T-DRAM
A capacitorless one-transistor dynamic random-access memory device that uses a poly-silicon body (poly-Si 1T-DRAM) has been suggested to overcome the scaling limit of conventional one-transistor one-capacitor dynamic random-access memory (1T-1C DRAM). A poly-Si 1T-DRAM cell operates as a memory by u...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/11/11/952 |