Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case...

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Bibliographic Details
Main Authors: Yunfang Ni, Hongsheng Li, Libin Huang
Format: Article
Language:English
Published: MDPI AG 2014-10-01
Series:Sensors
Subjects:
MEMS
silicon micro-gyroscope
quadrature compensation
mechanical design
Online Access:http://www.mdpi.com/1424-8220/14/11/20419

Internet

http://www.mdpi.com/1424-8220/14/11/20419

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