Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment

Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment

The recent increasing demand of Silicon-on-Chip devices has triggered a significant impact on the industrial processes of leading semiconductor companies. The semiconductor industry is redesigning internal technology processes trying to optimize costs and production yield. To achieve this target a k...

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Bibliographic Details
Main Authors: Riccardo Emanuele Sarpietro, Carmelo Pino, Salvatore Coffa, Angelo Messina, Simone Palazzo, Sebastiano Battiato, Concetto Spampinato, Francesco Rundo
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Artificial intelligence
convolutional neural network
explainable architectures
hierarchical clustering
Online Access:https://ieeexplore.ieee.org/document/9877886/

Internet

https://ieeexplore.ieee.org/document/9877886/

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