Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors

Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors

The quality factor of microelectromechanical resonators is a crucial performance metric and has thus been the subject of numerous studies aimed at maximizing its value by minimizing the anchor loss. This work presents a study on the effect of elastic wave reflectors on the quality factor of MEMS cla...

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Bibliographic Details
Main Authors: Mohammad Kazemi, Seyedfakhreddin Nabavi, Mathieu Gratuze, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micromachines
Subjects:
beam resonators
acoustic wave reflector
quality factor
anchor losses
Online Access:https://www.mdpi.com/2072-666X/14/11/2036

Internet

https://www.mdpi.com/2072-666X/14/11/2036

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