Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters

Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters

Dichroic filters with the hexagonal lattice of circular holes are used as fundamental devices for frequency selection from the infrared to the terahertz (THz) region. In the fabrication of such a high-density periodic array by the contact-mode photolithography, the depth of focus (DOF) turns out to...

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Bibliographic Details
Main Authors: Shaolin Zhou, Junbo Liu, Qian Deng, Changqing Xie, Mansun Chan
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Photonics Journal
Subjects:
Diffraction
photolithography
terahertz filters
hexagonal array
Online Access:https://ieeexplore.ieee.org/document/7536185/

Internet

https://ieeexplore.ieee.org/document/7536185/

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