The elasticity and piezoelectricity of AlN containing charged vacancies

The elasticity and piezoelectricity of AlN containing charged vacancies

Wurtzite aluminum nitride (w-AlN) piezoelectric film plays a key role in modern MEMS actuators and sensors. Density functional theory can be used to predict the elastic and piezoelectric properties of AlN containing various charged vacancies, thereby obtaining methods for improving the piezoelectric...

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Bibliographic Details
Main Authors: Qiaoya Lv, Jian Qiu, Quan Wen
Format: Article
Language:English
Published: Taylor & Francis Group 2024-12-01
Series:International Journal of Optomechatronics
Subjects:
AlN
charged vacancy
piezoelectricity
elasticity
DFT calculation
Online Access:https://www.tandfonline.com/doi/10.1080/15599612.2024.2332242

Internet

https://www.tandfonline.com/doi/10.1080/15599612.2024.2332242

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