Heterogeneous interconnection of low-loss and dense material platforms using adiabatic tapering coupler
Recently, we successfully realized amorphous silicon carbide (a-SiC) integrated photonics with optical losses as low as 0.78 dB/cm. Moreover, the deposition of a-SiC was done at 150 ℃, which enables successful lift of a-SiC as an additive step to existing photonics circuits. In this work, we present...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_01014.pdf |