Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications
<b> </b>This paper presents for the first time, the integration of ultra-thin (<10 nm) atomic layer deposition (ALD) aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) membranes as electron transparent windows (ETWs) for transmission electron microscope (TEM) nan...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1001 |