Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications
<b> </b>This paper presents for the first time, the integration of ultra-thin (<10 nm) atomic layer deposition (ALD) aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) membranes as electron transparent windows (ETWs) for transmission electron microscope (TEM) nan...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1001 |
| _version_ | 1811232244148207616 |
|---|---|
| author | Levar Goossen Jia Wei Gregory Pandraud Violeta Prodanovic Pasqualina M. Sarro |
| author_facet | Levar Goossen Jia Wei Gregory Pandraud Violeta Prodanovic Pasqualina M. Sarro |
| author_sort | Levar Goossen |
| collection | DOAJ |
| description | <b> </b>This paper presents for the first time, the integration of ultra-thin (<10 nm) atomic layer deposition (ALD) aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) membranes as electron transparent windows (ETWs) for transmission electron microscope (TEM) nanoreactor applications. The process was successfully implemented and tested in a TEM. ETWs with thicknesses down to 5 and 10 nm were used to image nanoparticles (NPs) in a 120 keV TEM and 200 keV TEM respectively. |
| first_indexed | 2024-04-12T11:00:18Z |
| format | Article |
| id | doaj.art-7419da63587345ab9f4cd58aff15006c |
| institution | Directory Open Access Journal |
| issn | 2504-3900 |
| language | English |
| last_indexed | 2024-04-12T11:00:18Z |
| publishDate | 2018-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj.art-7419da63587345ab9f4cd58aff15006c2022-12-22T03:35:59ZengMDPI AGProceedings2504-39002018-12-01213100110.3390/proceedings2131001proceedings2131001Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor ApplicationsLevar Goossen0Jia Wei1Gregory Pandraud2Violeta Prodanovic3Pasqualina M. Sarro4ECTM, Faculty of Electrical Engineering, Mathematics and Computer Sciences, Delft University of Technology, 2628 CD Delft, The NetherlandsEKL, Delft University of Technology, 2628 CT Delft, The NetherlandsEKL, Delft University of Technology, 2628 CT Delft, The NetherlandsECTM, Faculty of Electrical Engineering, Mathematics and Computer Sciences, Delft University of Technology, 2628 CD Delft, The NetherlandsECTM, Faculty of Electrical Engineering, Mathematics and Computer Sciences, Delft University of Technology, 2628 CD Delft, The Netherlands<b> </b>This paper presents for the first time, the integration of ultra-thin (<10 nm) atomic layer deposition (ALD) aluminum oxide (Al<sub>2</sub>O<sub>3</sub>) membranes as electron transparent windows (ETWs) for transmission electron microscope (TEM) nanoreactor applications. The process was successfully implemented and tested in a TEM. ETWs with thicknesses down to 5 and 10 nm were used to image nanoparticles (NPs) in a 120 keV TEM and 200 keV TEM respectively.https://www.mdpi.com/2504-3900/2/13/1001nanoreactorultra-thin membraneALD Al<sub>2</sub>O<sub>3</sub>electron transparent windows |
| spellingShingle | Levar Goossen Jia Wei Gregory Pandraud Violeta Prodanovic Pasqualina M. Sarro Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications Proceedings nanoreactor ultra-thin membrane ALD Al<sub>2</sub>O<sub>3</sub> electron transparent windows |
| title | Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications |
| title_full | Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications |
| title_fullStr | Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications |
| title_full_unstemmed | Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications |
| title_short | Ultra-Thin Integrated ALD Al<sub>2</sub>O<sub>3</sub> Electron-Transparent Windows for TEM Nanoreactor Applications |
| title_sort | ultra thin integrated ald al sub 2 sub o sub 3 sub electron transparent windows for tem nanoreactor applications |
| topic | nanoreactor ultra-thin membrane ALD Al<sub>2</sub>O<sub>3</sub> electron transparent windows |
| url | https://www.mdpi.com/2504-3900/2/13/1001 |
| work_keys_str_mv | AT levargoossen ultrathinintegratedaldalsub2subosub3subelectrontransparentwindowsfortemnanoreactorapplications AT jiawei ultrathinintegratedaldalsub2subosub3subelectrontransparentwindowsfortemnanoreactorapplications AT gregorypandraud ultrathinintegratedaldalsub2subosub3subelectrontransparentwindowsfortemnanoreactorapplications AT violetaprodanovic ultrathinintegratedaldalsub2subosub3subelectrontransparentwindowsfortemnanoreactorapplications AT pasqualinamsarro ultrathinintegratedaldalsub2subosub3subelectrontransparentwindowsfortemnanoreactorapplications |